Inventor · disambiguated record
Paul Aoyagi
Also filed as: AOYAGI PAUL
9 granted patents·73 citations·filing 2004–2018
87Inventor score
Top patents by PatentIndex Score
9 records- 0198US9470639B1Optical metrology with reduced sensitivity to grating anomaliesKLA TENCOR CORP·Filed 2016·Granted Oct 18, 2016·31 cites·20 claims
- 0288US11156548B2Measurement methodology of advanced nanostructuresKLA TENCOR CORP·Filed 2018·Granted Oct 26, 2021·6 cites·20 claims
- 0380US7760358B1Film measurementKLA TENCOR CORP·Filed 2007·Granted Jul 20, 2010·7 cites·20 claims
- 0476US7375828B1Modal method modeling of binary gratings with improved eigenvalue computationKLA TENCOR CORP·Filed 2005·Granted May 20, 2008·9 cites·14 claims
- 0575US9127927B2Techniques for optimized scatterometryILORETA JONATHAN·Filed 2012·Granted Sep 8, 2015·5 cites·40 claims
- 0660US7345761B1Film measurementKLA TENCOR TECH CORP·Filed 2004·Granted Mar 18, 2008·3 cites·20 claims
- 0755US7362686B1Film measurement using reflectance computationKLA TENCOR TECH CORP·Filed 2004·Granted Apr 22, 2008·7 cites·20 claims
- 0850US7190453B1Film measurementKLA TENCOR TECH CORP·Filed 2004·Granted Mar 13, 2007·5 cites·20 claims
- 0940US10481088B2Automatic determination of fourier harmonic order for computation of spectral information for diffraction structuresBACKUES MARK·Filed 2014·Granted Nov 19, 2019·0 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →