Inventor

TSAI YA-YI

TW37 patents

⚠️ This page may combine multiple inventors who share the name “TSAI YA-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSAI YA-YI

TAIWAN SEMICONDUCTOR MFG CO LTD

Cut metal gate with slanted sidewalls

Semiconductor devices and methods of manufacturing thereof

Residue-free metal gate cutting for fin-like field effect transistor

Cut metal gate processes

Transistor gates and methods of forming thereof

Semiconductor device with cut metal gate and method of manufacture

Dummy gate cutting process and resulting gate structures

Cut metal gate processes

Residue-free metal gate cutting for fin-like field effect transistor

Multi-layer dielectric refill for profile control in semiconductor devices

Multi-layer dielectric refill for profile control in semiconductor devices

Semiconductor device and method

Semiconductor devices and methods of manufacturing thereof

Cut metal gate processes

Transistor gates and methods of forming thereof

Multi-layer dielectric refill for profile control in semiconductor devices

Residue-free metal gate cutting for fin-like field effect transistor

Semiconductor devices and methods of manufacturing thereof

Dummy gate cutting process and resulting gate structures

Semiconductor device with cut metal gate and method of manufacture

Fin field-effect transistor and method of forming the same

Cut metal gate processes

Residue-free metal gate cutting for fin-like field effect transistor

Transistor gates and methods of forming thereof

Dummy gate cutting process and resulting gate structures

Semiconductor device with cut metal gate and method of manufacture

Fin Field-Effect Transistor and method of forming the same

Cut metal gate with slanted sidewalls

Fin field-effect transistor and method of forming the same

Residue-free metal gate cutting for fin-like field effect transistor

Semiconductor devices with interface between gate isolation structure and dummy channel having curved profile and methods of manufacturing thereof

Semiconductor devices with gate isolation structures and methods of manufacturing thereof

Method of forming semiconductor device and semiconductor device

Semiconductor devices and methods of manufacturing thereof

Semiconductor devices and methods of manufacturing thereof

Method of forming semiconductor structure and semiconductor device

TAIWAN SEMICONDUTOR MFG COMPANY LIMITED

Semiconductor devices and methods of manufacturing thereof