Inventor
TURNER NORMAN L
US33 patents
⚠️ This page may combine multiple inventors who share the name “TURNER NORMAN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
11 patentsUS4567938AFeb 4, 1986
Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
VARIAN ASSOCIATES63 citations96
US4283631AAug 11, 1981
Bean scanning and method of use for ion implantation
VARIAN ASSOCIATES64 citations96
US4421988ADec 20, 1983
Beam scanning method and apparatus for ion implantation
VARIAN ASSOCIATES59 citations94
US4680474AJul 14, 1987
Method and apparatus for improved ion dose accuracy
VARIAN ASSOCIATES26 citations92
US4535834AAug 20, 1985
Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
VARIAN ASSOCIATES50 citations92
US4433247AFeb 21, 1984
Beam sharing method and apparatus for ion implantation
VARIAN ASSOCIATES28 citations92
US4367411AJan 4, 1983
Unitary electromagnet for double deflection scanning of charged particle beam
VARIAN ASSOCIATES49 citations91
US4463255AJul 31, 1984
Apparatus for enhanced neutralization of positively charged ion beam
VARIAN ASSOCIATES40 citations90
US4412153AOct 25, 1983
Dual filament ion source
VARIAN ASSOCIATES23 citations76
US4717829AJan 5, 1988
Platen and beam setup flag assembly for ion implanter
VARIAN ASSOCIATES12 citations74
US4475045AOct 2, 1984
Rapid pumpdown for high vacuum processing
VARIAN ASSOCIATES7 citations74
APPLIED MATERIALS INC
6 patentsUS5512320AApr 30, 1996
Vacuum processing apparatus having improved throughput
APPLIED MATERIALS INC261 citations99
US5607009AMar 4, 1997
Method of heating and cooling large area substrates and apparatus therefor
APPLIED MATERIALS INC138 citations98
US6688375B1Feb 10, 2004
Vacuum processing system having improved substrate heating and cooling
APPLIED MATERIALS INC266 citations96
US5674786AOct 7, 1997
Method of heating and cooling large area glass substrates
APPLIED MATERIALS INC220 citations96
US6746198B2Jun 8, 2004
Substrate transfer shuttle
APPLIED MATERIALS INC42 citations93
US6881305B2Apr 19, 2005
Heated and cooled vacuum chamber shield
APPLIED MATERIALS INC39 citations89
PURSER KENNETH H
6 patentsUS7301156B2Nov 27, 2007
Controlling the characteristics of implanter ion-beams
PURSER KENNETH H25 citations92
US7888660B2Feb 15, 2011
Controlling the characteristics of implanter ion-beams
PURSER KENNETH H8 citations83
US7414249B2Aug 19, 2008
Broad energy-range ribbon ion beam collimation using a variable-gradient dipole
PURSER KENNETH H5 citations73
US4775796AOct 4, 1988
Treating workpieces with beams
PURSER KENNETH H13 citations73
US7897943B2Mar 1, 2011
Controlling the characteristics of implanter ion-beams
PURSER KENNETH H2 citations62
US7829866B2Nov 9, 2010
Broad energy-range ribbon ion beam collimation using a variable-gradient dipole
PURSER KENNETH H2 citations62
APPLIED KOMATSU TECHNOLOGY INC
4 patentsUS6517303B1Feb 11, 2003
Substrate transfer shuttle
APPLIED KOMATSU TECHNOLOGY INC79 citations98
US6235634B1May 22, 2001
Modular substrate processing system
APPLIED KOMATSU TECHNOLOGY INC420 citations98
US5753133AMay 19, 1998
Method and apparatus for etching film layers on large substrates
APPLIED KOMATSU TECHNOLOGY INC36 citations92
US6432203B1Aug 13, 2002
Heated and cooled vacuum chamber shield
APPLIED KOMATSU TECHNOLOGY INC32 citations89
VARIAN SEMICONDUCTOR EQUIPMENT
3 patentsUS7351984B2Apr 1, 2008
Controlling the characteristics of implanter ion-beams
VARIAN SEMICONDUCTOR EQUIPMENT7 citations73
US7439526B2Oct 21, 2008
Beam neutralization in low-energy high-current ribbon-beam implanters
VARIAN SEMICONDUCTOR EQUIPMENT3 citations63
US7365340B2Apr 29, 2008
Resonance method for production of intense low-impurity ion beams of atoms and molecules
VARIAN SEMICONDUCTOR EQUIPMENT2 citations61