Inventor
SAKKA YUSAKU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SAKKA YUSAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUSD847237SApr 30, 2019
Substrate processing unit
HITACHI HIGH TECH CORP2 citations69
US11710619B2Jul 25, 2023
Vacuum processing apparatus
HITACHI HIGH TECH CORP1 citations60
US10998168B2May 4, 2021
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations60
USD831085SOct 16, 2018
Substrate processing unit
HITACHI HIGH TECH CORP0 citations48
USD831086SOct 16, 2018
Substrate processing unit
HITACHI HIGH TECH CORP1 citations48
US10522333B2Dec 31, 2019
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations38