Inventor
KAWAGUCHI TADAYOSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KAWAGUCHI TADAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS11094509B2Aug 17, 2021
Plasma processing apparatus
HITACHI HIGH TECH CORP2 citations71
USD1094319SSep 23, 2025
Upper chamber for a plasma processing device
HITACHI HIGH TECH CORP0 citations61
US10796884B2Oct 6, 2020
Plasma processing apparatus
HITACHI HIGH TECH CORP1 citations61
US10998168B2May 4, 2021
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations60
US6914207B2Jul 5, 2005
Plasma processing method
HITACHI HIGH TECH CORP6 citations58
US10229813B2Mar 12, 2019
Plasma processing apparatus with lattice-like faraday shields
HITACHI HIGH TECH CORP0 citations40