Inventor
LOEFFLER DANIEL
DE12 patents
⚠️ This page may combine multiple inventors who share the name “LOEFFLER DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BASF SE
11 patentsUS11180719B2Nov 23, 2021
Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below
BASF SE2 citations68
US11970647B2Apr 30, 2024
Composition, its use and a process for selectively etching silicon-germanium material
BASF SE1 citations57
US12146125B2Nov 19, 2024
Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below
BASF SE0 citations56
US10344381B2Jul 9, 2019
Process for the generation of thin inorganic films
BASF SE1 citations55
US10787738B2Sep 29, 2020
Process for the generation of thin inorganic films
BASF SE1 citations54
US10106888B2Oct 23, 2018
Process for the generation of thin inorganic films
BASF SE0 citations49
US10570514B2Feb 25, 2020
Process for the generation of metallic films
BASF SE0 citations48
US12518960B2Jan 6, 2026
Composition comprising a siloxane and an alkane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 NM or below
BASF SE0 citations45
US10669297B2Jun 2, 2020
Process for the generation of thin inorganic films
BASF SE0 citations45
US11515525B2Nov 29, 2022
Process for coating an oxide material
BASF SE0 citations44
US10801105B2Oct 13, 2020
Process for the generation of thin inorganic films
BASF SE0 citations44