Inventor · disambiguated record

Katsuhiro Kosuga

Also filed as: KOSUGA KATSUHIRO

1 granted patent·1 pending application·0 citations·filing 2014–2017

7Inventor score

Technology areasC23C H10P

Files withSHINKO ELECTRIC IND CO1 TOKYO ELECTRON LTD1

Top patents by PatentIndex Score

2 records

0152US2015107771A1Trap apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
0232US10847401B2Wafer holding apparatus and baseplate structureSHINKO ELECTRIC IND CO·Filed 2017·Granted Nov 24, 2020·0 cites·6 claims

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