Inventor · disambiguated record
Gertraud Lammer
Also filed as: LAMMER GERTRAUD
6 granted patents·3 pending applications·1,803 citations·filing 1992–2007
88Inventor score
Top patents by PatentIndex Score
9 records- 0198US7388217B2Particle-optical projection systemIMS NANOFABRICATION GMBH·Filed 2007·Granted Jun 17, 2008·1.5k cites·9 claims
- 0297US6768125B2Maskless particle-beam system for exposing a pattern on a substrateIMS NANOFABRICATION GMBH·Filed 2003·Granted Jul 27, 2004·186 cites·21 claims
- 0393US7084411B2Pattern-definition device for maskless particle-beam exposure apparatusIMS NANOFABRICATION GMBH·Filed 2004·Granted Aug 1, 2006·90 cites·19 claims
- 0486US7199373B2Particle-optic electrostatic lensIMS NANOFABRICATION GMBH·Filed 2004·Granted Apr 3, 2007·27 cites·10 claims
- 0563US6326632B1Particle-optical imaging system for lithography purposesIMS IONEN MIKROFAB SYST·Filed 1999·Granted Dec 4, 2001·23 cites·7 claims
- 0654US5317161AIon sourceIMS IONEN MIKROFAB SYST·Filed 1992·Granted May 31, 1994·13 cites·16 claims
- 0751US2005201246A1Particle-optical projection systemIMS NANOFABRICATION GMBH·Filed 2005·Application pending·0 cites
- 0834US2001036588A1Lithographic imaging of a structure pattern onto one or more fields on a substrateIMS IONEN MIKROFAB SYST·Filed 2001·Application pending·0 cites
- 0933US2002148976A1Thermal control of image pattern distortionsFiled 2002·Application pending·0 cites
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