Inventor
ZHAO EUGENE Y
US4 patents
Patents
4 patentsUS6561889B1May 13, 2003
Methods for making reinforced wafer polishing pads and apparatuses implementing the same
LAM RES CORP83 citations96
US6572463B1Jun 3, 2003
Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same
LAM RES CORP56 citations94
US6641470B1Nov 4, 2003
Apparatus for accurate endpoint detection in supported polishing pads
LAM RES CORP43 citations84
US6949020B2Sep 27, 2005
Methods for making reinforced wafer polishing pads and apparatuses implementing the same
LAM RES CORP13 citations82