Inventor
FURUSAWA MANATO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “FURUSAWA MANATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
4 patentsUSD1119829SMar 24, 2026
Seal for chemical mechanical polishing device
EBARA CORP0 citations59
USD1102398SNov 18, 2025
Seal for chemical mechanical polishing device
EBARA CORP0 citations59
US12403507B2Sep 2, 2025
Transfer apparatus, cleaning module, and substrate processing apparatus
EBARA CORP0 citations53
US11701750B2Jul 18, 2023
Top ring for holding a substrate and substrate processing apparatus
EBARA CORP0 citations44