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Seal for chemical mechanical polishing device

Assignee: EBARA CORPPriority: Mar 30, 2023Filed: Sep 26, 2023Granted: Mar 24, 2026
Est. expiryMar 30, 2043(~16.7 yrs left)· nominal 20-yr term from priority
Inventors:TAJIMA KAZUHIROKASHIWAGI MAKOTOFURUSAWA MANATO
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a seal for chemical mechanical polishing device as shown and described.

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