Inventor
KASHIWAGI MAKOTO
JP34 patents
⚠️ This page may combine multiple inventors who share the name “KASHIWAGI MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
28 patentsUSD799690SOct 10, 2017
Inner cylinder for exhaust gas treatment apparatus
EBARA CORP20 citations88
US11511389B2Nov 29, 2022
Polishing head and polishing apparatus
EBARA CORP3 citations73
US11697184B2Jul 11, 2023
Substrate processing apparatus and substrate processing method
EBARA CORP2 citations72
US11400561B2Aug 2, 2022
Top ring for holding a substrate and substrate processing apparatus
EBARA CORP3 citations71
US10458020B2Oct 29, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP3 citations70
US10427269B2Oct 1, 2019
Polishing apparatus and polishing method
EBARA CORP5 citations70
US12377516B2Aug 5, 2025
Polishing head and polishing apparatus
EBARA CORP0 citations62
US11865665B2Jan 9, 2024
Polishing apparatus
EBARA CORP1 citations62
US11511386B2Nov 29, 2022
Polishing apparatus and polishing method
EBARA CORP0 citations62
US10926376B2Feb 23, 2021
Method and apparatus for polishing a substrate, and method for processing a substrate
EBARA CORP0 citations62
US12406874B2Sep 2, 2025
Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method
EBARA CORP0 citations61
US12002704B2Jun 4, 2024
Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method
EBARA CORP0 citations61
US11305399B2Apr 19, 2022
Jig for a polishing apparatus
EBARA CORP0 citations61
USD1119829SMar 24, 2026
Seal for chemical mechanical polishing device
EBARA CORP0 citations59
USD1102398SNov 18, 2025
Seal for chemical mechanical polishing device
EBARA CORP0 citations59
US11804398B2Oct 31, 2023
Workpiece supporting apparatus and workpiece supporting method
EBARA CORP0 citations59
US11180853B2Nov 23, 2021
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations59
US11370080B2Jun 28, 2022
Polishing head for holding substrate and substrate processing apparatus
EBARA CORP0 citations52
US11335588B2May 17, 2022
Substrate holding apparatus and substrate processing apparatus
EBARA CORP0 citations51
USD890825SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
USD890824SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
USD890822SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
USD890823SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
US11638980B2May 2, 2023
Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus
EBARA CORP0 citations50
US12237194B2Feb 25, 2025
Substrate transporter and substrate processing apparatus including substrate transporter
EBARA CORP0 citations49
US11331768B2May 17, 2022
Polishing head and polishing apparatus
EBARA CORP0 citations48
US11701750B2Jul 18, 2023
Top ring for holding a substrate and substrate processing apparatus
EBARA CORP0 citations44
US10227926B2Mar 12, 2019
Exhaust gas abatement system
EBARA CORP0 citations38