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Substrate holding parts

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Assignee: EBARA CORPPriority: Jul 18, 2018Filed: Jan 16, 2019Granted: Jul 21, 2020
Est. expiryJul 18, 2038(~12 yrs left)· nominal 20-yr term from priority
Inventors:Kenichi KobayashiAsagi MatsuguMakoto KashiwagiManao Hoshina
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate holding parts, as shown and described.

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