Inventor · disambiguated record
Makoto Kashiwagi
Also filed as: KASHIWAGI MAKOTO
33 granted patents·15 pending applications·44 citations·filing 2004–2024
94Inventor score
Files withEBARA CORP40ADAMANT NAMIKI PREC JEWEL CO LTD1AKAHORI MASAJI1ARAI HIROYUKI1HITACHI AUTOMOTIVE SYSTEMS LTD1
Top patents by PatentIndex Score
48 records- 0190US10427269B2Polishing apparatus and polishing methodEBARA CORP·Filed 2017·Granted Oct 1, 2019·5 cites·8 claims
- 0289US11697184B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2020·Granted Jul 11, 2023·2 cites·22 claims
- 0384US11511389B2Polishing head and polishing apparatusEBARA CORP·Filed 2019·Granted Nov 29, 2022·3 cites·11 claims
- 0483US11400561B2Top ring for holding a substrate and substrate processing apparatusEBARA CORP·Filed 2019·Granted Aug 2, 2022·3 cites·18 claims
- 0580US12406874B2Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing methodEBARA CORP·Filed 2024·Granted Sep 2, 2025·0 cites·8 claims
- 0680US10458020B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2016·Granted Oct 29, 2019·3 cites·12 claims
- 0775USD799690SInner cylinder for exhaust gas treatment apparatusEBARA CORP·Filed 2015·Granted Oct 10, 2017·20 cites·1 claims
- 0873US11865665B2Polishing apparatusEBARA CORP·Filed 2018·Granted Jan 9, 2024·1 cites·16 claims
- 0972US2024091899A1Polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 1069US9217428B2Tubing pump for delivering fluid in a tubeNAMIKI PREC SINGAPORE PTE LTD·Filed 2013·Granted Dec 22, 2015·2 cites·3 claims
- 1168US12377516B2Polishing head and polishing apparatusEBARA CORP·Filed 2021·Granted Aug 5, 2025·0 cites·14 claims
- 1267US11511386B2Polishing apparatus and polishing methodEBARA CORP·Filed 2019·Granted Nov 29, 2022·0 cites·13 claims
- 1364US11370080B2Polishing head for holding substrate and substrate processing apparatusEBARA CORP·Filed 2020·Granted Jun 28, 2022·0 cites·9 claims
- 1464US8246732B2Exhaust gas cleaning apparatusARAI HIROYUKI·Filed 2008·Granted Aug 21, 2012·2 cites·11 claims
- 1564US2024316722A1Top ring of polishing apparatus and polishing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 1663US11638980B2Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatusEBARA CORP·Filed 2020·Granted May 2, 2023·0 cites·6 claims
- 1761US9541221B2Tube clamp structure of tubing pumpNAMIKI PRECISION JEWEL CO LTD·Filed 2013·Granted Jan 10, 2017·3 cites·4 claims
- 1859US11456406B2Silicon bulk thermoelectric conversion materialJAPAN SCIENCE & TECH AGENCY·Filed 2018·Granted Sep 27, 2022·0 cites·2 claims
- 1956US2025100103A1Polishing head and polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 2056US2025162100A1Polishing head and polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 2156US2025178150A1Substrate polishing methodEBARA CORP·Filed 2023·Application pending·0 cites
- 2255US12002704B2Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing methodEBARA CORP·Filed 2018·Granted Jun 4, 2024·0 cites·6 claims
- 2355US11804398B2Workpiece supporting apparatus and workpiece supporting methodEBARA CORP·Filed 2021·Granted Oct 31, 2023·0 cites·9 claims
- 2455US11180853B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2019·Granted Nov 23, 2021·0 cites·13 claims
- 2555US2025050462A1Substrate processing method and substrate processing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 2655US2025229378A1Substrate processing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 2755US2025178149A1Substrate polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 2853US11858487B2Brake control apparatus and method for detecting abnormality in brake control apparatusHITACHI AUTOMOTIVE SYSTEMS LTD·Filed 2019·Granted Jan 2, 2024·0 cites·11 claims
- 2953US11331768B2Polishing head and polishing apparatusEBARA CORP·Filed 2018·Granted May 17, 2022·0 cites·20 claims
- 3051US11335588B2Substrate holding apparatus and substrate processing apparatusEBARA CORP·Filed 2020·Granted May 17, 2022·0 cites·13 claims
- 3150US2024109161A1Polishing apparatus and polishing methodEBARA CORP·Filed 2022·Application pending·0 cites
- 3250US2024416480A1Substrate suction member, elastic seal assembly, top ring, and substrate processing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 3349US10926376B2Method and apparatus for polishing a substrate, and method for processing a substrateEBARA CORP·Filed 2018·Granted Feb 23, 2021·0 cites·17 claims
- 3449US10227926B2Exhaust gas abatement systemEBARA CORP·Filed 2014·Granted Mar 12, 2019·0 cites·10 claims
- 3549US2024006204A1Head for holding substrate and substrate processing apparatusEBARA CORP·Filed 2021·Application pending·0 cites
- 3648US2024165759A1Workpiece processing apparatus and workpiece processing methodEBARA CORP·Filed 2022·Application pending·0 cites
- 3747US10012225B2Tubing pumpADAMANT NAMIKI PREC JEWEL CO LTD·Filed 2013·Granted Jul 3, 2018·0 cites·9 claims
- 3846US12237194B2Substrate transporter and substrate processing apparatus including substrate transporterEBARA CORP·Filed 2019·Granted Feb 25, 2025·0 cites·29 claims
- 3945US11305399B2Jig for a polishing apparatusEBARA CORP·Filed 2019·Granted Apr 19, 2022·0 cites·12 claims
- 4044US2008023334A1Liquid Treatment ApparatusEBARA CORP·Filed 2005·Application pending·0 cites
- 4143US11701750B2Top ring for holding a substrate and substrate processing apparatusEBARA CORP·Filed 2020·Granted Jul 18, 2023·0 cites·18 claims
- 4242US2007215477A1Bipolar Chamber and Electrochemical Liquid Treatment Apparatus Having Such Bipolar ChamberAKAHORI MASAJI·Filed 2005·Application pending·0 cites
- 4338US2006243604A1Method and apparatus for treating waste waterNAKAGAWA SOTA·Filed 2004·Application pending·0 cites
- 4430USD890823SSubstrate holding partsEBARA CORP·Filed 2019·Granted Jul 21, 2020·0 cites·1 claims
- 4530USD890825SSubstrate holding partsEBARA CORP·Filed 2019·Granted Jul 21, 2020·0 cites·1 claims
- 4630USD890822SSubstrate holding partsEBARA CORP·Filed 2019·Granted Jul 21, 2020·0 cites·1 claims
- 4730USD890824SSubstrate holding partsEBARA CORP·Filed 2019·Granted Jul 21, 2020·0 cites·1 claims
- 4829USD1102398SSeal for chemical mechanical polishing deviceEBARA CORP·Filed 2023·Granted Nov 18, 2025·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →