Inventor
HSU YU-HSUN
TW9 patents
Patents
9 patentsUS11353501B2Jun 7, 2022
Wafer inspection method and wafer probing system
MPI CORP2 citations70
US9958477B2May 1, 2018
Testing machine and operation method thereof
MPI CORP2 citations62
US11287475B2Mar 29, 2022
Method for compensating to distance between probe tip and device under test after temperature changes
MPI CORP0 citations50
US12196808B2Jan 14, 2025
Motorized chuck stage controlling method
MPI CORP0 citations49
US10976363B2Apr 13, 2021
Wafer inspection method and wafer probing system
MPI CORP0 citations49
US10895587B2Jan 19, 2021
Wafer probe station
MPI CORP0 citations46
US10312123B2Jun 4, 2019
Method for compensating probe misplacement and probe apparatus
MPI CORP0 citations46
US11313883B2Apr 26, 2022
Probe station capable of maintaining position of probe tip upon temperature change
MPI CORP0 citations44
US12007319B2Jun 11, 2024
Optical path correction subassembly, optical detection assembly, and optical detection system
MPI CORP0 citations43