Inventor · disambiguated record
David T. Hodul
Also filed as: HODUL DAVID · HODUL DAVID T
4 granted patents·577 citations·filing 1991–1997
83Inventor score
Top patents by PatentIndex Score
4 records- 0194US6030666AMethod for microwave plasma substrate heatingLAM RES CORP·Filed 1997·Granted Feb 29, 2000·267 cites·18 claims
- 0294US5913140AMethod for reduction of plasma charging damage during chemical vapor depositionLAM RES CORP·Filed 1996·Granted Jun 15, 1999·239 cites·8 claims
- 0383US5869149AMethod for preparing nitrogen surface treated fluorine doped silicon dioxide filmsLAM RES CORP·Filed 1997·Granted Feb 9, 1999·66 cites·17 claims
- 0432US5203631ANarrow spectral band pyrometryVARIAN ASSOCIATES·Filed 1991·Granted Apr 20, 1993·5 cites·14 claims
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