Inventor · disambiguated record
Wakako Ishida
Also filed as: ISHIDA WAKAKO
4 granted patents·1 pending application·42 citations·filing 2017–2023
65Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0193US10658189B2Etching methodTOKYO ELECTRON LTD·Filed 2017·Granted May 19, 2020·42 cites·18 claims
- 0253US12341001B2Cleaning method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jun 24, 2025·0 cites·12 claims
- 0347US2024212982A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0445US11328934B2Etching method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted May 10, 2022·0 cites·12 claims
- 0541US11430664B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Aug 30, 2022·0 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →