Inventor · disambiguated record
Norbertus Josephus Martinus Van Den Nieuwelaar
Also filed as: VAN DEN NIEUWELAAR NORBERTUS J · VAN DEN NIEUWELAAR NORBERTUS JOSEPHUS MARTINUS
14 granted patents·41 citations·filing 2004–2020
88Inventor score
Top patents by PatentIndex Score
14 records- 0186US9329491B2Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatusGROUWSTRA CÉDRIC DÉSIRÉ·Filed 2011·Granted May 3, 2016·7 cites·21 claims
- 0271US7195407B2Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer programASML NETHERLANDS BV·Filed 2006·Granted Mar 27, 2007·10 cites·12 claims
- 0370US8825182B2Position control system, lithographic apparatus, and method to control a position of a movable objectSIMONS WILHELMUS FRANCISCUS JOHANNES·Filed 2011·Granted Sep 2, 2014·3 cites·16 claims
- 0464US9606457B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·2 cites·14 claims
- 0564US7068351B2Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer programASML NETHERLANDS BV·Filed 2004·Granted Jun 27, 2006·8 cites·31 claims
- 0656US10534270B2Lithography apparatus, a method of manufacturing a device and a control programASML NETHERLANDS BV·Filed 2019·Granted Jan 14, 2020·0 cites·20 claims
- 0755US9964865B2Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 8, 2018·0 cites·20 claims
- 0855US7184849B2Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer programASML NETHERLANDS BV·Filed 2004·Granted Feb 27, 2007·7 cites·34 claims
- 0950US12405542B2Method of determining a mark measurement sequence, stage apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Sep 2, 2025·0 cites·28 claims
- 1048US11644755B2Lithographic methodASML NETHERLANDS BV·Filed 2019·Granted May 9, 2023·0 cites·20 claims
- 1147US7756597B2Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer programASML NETHERLANDS BV·Filed 2004·Granted Jul 13, 2010·4 cites·20 claims
- 1246US10261422B2Lithography apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2015·Granted Apr 16, 2019·0 cites·20 claims
- 1344US7817241B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Oct 19, 2010·0 cites·22 claims
- 1434US10627721B2Lithography apparatus, and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·0 cites·23 claims
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