Inventor
RIEPEN MICHEL
NL82 patents
⚠️ This page may combine multiple inventors who share the name “RIEPEN MICHEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
29 patentsUS7433016B2Oct 7, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV26 citations96
US7804577B2Sep 28, 2010
Lithographic apparatus
ASML NETHERLANDS BV26 citations92
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US10133190B2Nov 20, 2018
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV5 citations84
US9606449B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9442390B2Sep 13, 2016
Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV6 citations84
US7468779B2Dec 23, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations84
US8345218B2Jan 1, 2013
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7903232B2Mar 8, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations79
US7929112B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US10684554B2Jun 16, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US7928407B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US10620544B2Apr 14, 2020
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations72
US9846372B2Dec 19, 2017
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations72
US9588437B2Mar 7, 2017
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV2 citations72
US9411238B2Aug 9, 2016
Source-collector device, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV4 citations72
US7633073B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US11187991B2Nov 30, 2021
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations70
US9753383B2Sep 5, 2017
Radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations69
US11016394B2May 25, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US9477153B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US8023101B2Sep 20, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US11143968B2Oct 12, 2021
Fluid handling structure, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10990015B2Apr 27, 2021
Debris mitigation system, radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations60
US9213246B2Dec 15, 2015
Fluid extraction system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US12072635B2Aug 27, 2024
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations58
US10394141B2Aug 27, 2019
Radiation source and lithographic apparatus
ASML NETHERLANDS BV1 citations58
RIEPEN MICHEL
4 patentsUS8547523B2Oct 1, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
RIEPEN MICHEL28 citations92
US8634053B2Jan 21, 2014
Lithographic apparatus and device manufacturing method
RIEPEN MICHEL12 citations82
US8614784B2Dec 24, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply
RIEPEN MICHEL14 citations82
US9140995B2Sep 22, 2015
Fluid handling structure, a lithographic apparatus and a device manufacturing method
RIEPEN MICHEL3 citations62
CORTIE ROGIER HENDRIKUS MAGDALENA
3 patentsUS9069262B2Jun 30, 2015
Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing method
CORTIE ROGIER HENDRIKUS MAGDALENA7 citations83
US9256136B2Feb 9, 2016
Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply
CORTIE ROGIER HENDRIKUS MAGDALENA7 citations82
US9235138B2Jan 12, 2016
Fluid handling structure, a lithographic apparatus and a device manufacturing method
CORTIE ROGIER HENDRIKUS MAGDALENA3 citations71
STREEFKERK BOB
3 patentsUS8248577B2Aug 21, 2012
Lithographic apparatus and device manufacturing method
STREEFKERK BOB9 citations83
US8115903B2Feb 14, 2012
Lithographic apparatus and device manufacturing method
STREEFKERK BOB5 citations74
US8860924B2Oct 14, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB1 citations62
LEENDERS MARTINUS HENDRIKUS ANTONIUS
2 patentsCADEE THEODORUS PETRUS MARIA
2 patentsKEMPER NICOLAAS RUDOLF
2 patentsCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE
1 patentLAFARRE RAYMOND WILHELMUS LOUIS
1 patentDONDERS SJOERD NICOLAAS LAMBERTUS
1 patentJANSEN HANS
1 patentMONDT EVA
1 patentShowing the top 50 of 82 patents by PatentIndex Score.