Inventor
TSUJII KANJI
JP8 patents
Patents
8 patentsUS4716852AJan 5, 1988
Apparatus for thin film formation using photo-induced chemical reaction
HITACHI LTD61 citations96
US4615756AOct 7, 1986
Dry etching apparatus
HITACHI LTD54 citations96
US5140272AAug 18, 1992
Method of semiconductor surface measurment and an apparatus for realizing the same
HITACHI LTD34 citations92
US4678536AJul 7, 1987
Method of photochemical surface treatment
HITACHI LTD37 citations92
US4643799AFeb 17, 1987
Method of dry etching
HITACHI LTD38 citations92
US4887037ADec 12, 1989
Electron spin resonance spectrometer
HITACHI LTD7 citations73
US4653908AMar 31, 1987
Grazing incidence reflection spectrometer
HITACHI LTD16 citations73
US4936252AJun 26, 1990
Equipment for manufacturing semiconductor devices
HITACHI LTD1 citations51