Inventor · disambiguated record
Mun Ja Kim
Also filed as: KIM MUN JA
23 granted patents·9 pending applications·24 citations·filing 2008–2025
92Inventor score
Top patents by PatentIndex Score
32 records- 0195US12258494B2Adhesive for pellicle, pellicle for photo mask and method for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Mar 25, 2025·1 cites·18 claims
- 0292US9703186B2Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jul 11, 2017·7 cites·13 claims
- 0390US9690190B2Pellicles and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 27, 2017·3 cites·8 claims
- 0487US10065402B2Method of manufacturing pellicle assembly and method of photomask assembly including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Sep 4, 2018·5 cites·19 claims
- 0586US12297379B2Adhesive composition, method for preparing the same, reticle assembly including the same, and method for fabricating reticle assembly including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Granted May 13, 2025·0 cites·16 claims
- 0685US10437143B2Pellicle for exposure to extreme ultraviolet light, photomask assembly, and method of manufacturing the pellicleSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Oct 8, 2019·3 cites·14 claims
- 0777US12018183B2Adhesive composition, method for preparing the same, reticle assembly including the same, and method for fabricating reticle assembly including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jun 25, 2024·0 cites·10 claims
- 0871US10103071B2Pattern inspection methods and methods of fabricating reticles using the same via directing charged particle beams through discharge layersSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Oct 16, 2018·2 cites·18 claims
- 0970US11067887B2Apparatus for manufacturing pellicleSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jul 20, 2021·0 cites·14 claims
- 1068US11262648B2Pellicle for photomask and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 1, 2022·0 cites·7 claims
- 1168US10001700B2Pellicle film including graphite-containing thin film for extreme ultraviolet lithographySAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Jun 19, 2018·1 cites·7 claims
- 1266US12346022B2Method of fabricating pellicle structureSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jul 1, 2025·0 cites·20 claims
- 1365US11448957B2Pellicle transfer apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Sep 20, 2022·0 cites·19 claims
- 1465US8110979B2Inorganic electroluminescence device, display apparatus having the same and method thereofPARK SHANG-HYEUN·Filed 2009·Granted Feb 7, 2012·1 cites·19 claims
- 1563US11892767B2Stud attachment device and stud attachment method with independent temperature/pressure controlSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Feb 6, 2024·0 cites·19 claims
- 1663US10809614B2Pellicle for photomask and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Oct 20, 2020·0 cites·20 claims
- 1759US10747104B2Method of manufacturing pellicle and apparatus for assembling pellicleSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Aug 18, 2020·0 cites·14 claims
- 1859US9176375B2Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuitKIM SANG-HYUN·Filed 2014·Granted Nov 3, 2015·1 cites·20 claims
- 1959US2024036460A1Protective membrane for photo lithography, pellicle including the same, and method of forming the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 2058US2019390090A1Adhesive for pellicle, pellicle for photo mask and method for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Application pending·0 cites
- 2158US2025333312A1Method for treating carbon-based structure, method for treating graphene structure, and pellicle for photo mask including pellicle membraneSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 2257US10394117B2Pellicle film including graphite-containing thin film for extreme ultraviolet lithographySAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Aug 27, 2019·0 cites·20 claims
- 2352US2025013143A1Pellicle assembly, reticle assembly, reticle case, pellicle measurement method, and reticle measurement methodSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 2451US2022350240A1Methods of manufacturing a pellicle having graphite layerSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 2551US2023408905A1Pellicle for euv exposure and method for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 2651US2009110908A1Method of manufacturing dispersion type inorganic electroluminescence device and dispersion type inorganic electroluminescence deviceSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 2749US11073757B2Methods of manufacturing pellicle assembly and photomask assemblySAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jul 27, 2021·0 cites·20 claims
- 2848US10969702B2Extreme ultraviolet lithography apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 6, 2021·0 cites·16 claims
- 2942US2014220481A1Photomasks and methods of fabricating semiconductor devices using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Application pending·0 cites
- 3040US10345698B2Method for fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Jul 9, 2019·0 cites·20 claims
- 3139US11729896B2Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV systemSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Aug 15, 2023·0 cites·20 claims
- 3231US2017031142A1Apparatus generating extreme ultraviolet light and exposure system including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
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