Inventor
TSAI CHENG-HSIUNG MATT
US5 patents
Patents
5 patentsUSD933725SOct 19, 2021
Deposition ring for a substrate processing chamber
APPLIED MATERIALS INC52 citations95
USD891382SJul 28, 2020
Process shield for a substrate processing chamber
APPLIED MATERIALS INC55 citations95
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Process shield for a substrate processing chamber
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US11251028B2Feb 15, 2022
Pre-clean chamber with integrated shutter garage
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US6875927B2Apr 5, 2005
High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications
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