Inventor
KIKUMOTO NORIYUKI
JP21 patents
Patents
21 patentsUS10861717B2Dec 8, 2020
Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method
SCREEN HOLDINGS CO LTD2 citations71
US10229846B2Mar 12, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations71
US10727090B2Jul 28, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations70
US10921057B2Feb 16, 2021
Substrate drying method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10760852B2Sep 1, 2020
Substrate drying method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10636682B2Apr 28, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US11850623B2Dec 26, 2023
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations60
US11823929B2Nov 21, 2023
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations59
US11594436B2Feb 28, 2023
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations59
US10933448B2Mar 2, 2021
Substrate treatment apparatus and substrate treatment method
SCREEN HOLDINGS CO LTD1 citations59
US11342201B2May 24, 2022
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations52
US11315820B2Apr 26, 2022
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations52
US11823921B2Nov 21, 2023
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US11410865B2Aug 9, 2022
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11081376B2Aug 3, 2021
Substrate processing apparatus, transfer module, and coupling module
SCREEN HOLDINGS CO LTD0 citations50
US10115623B2Oct 30, 2018
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US9947572B2Apr 17, 2018
Substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations49
US11581208B2Feb 14, 2023
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10553422B2Feb 4, 2020
Substrate treatment method of treating substrate, and substrate treatment apparatus
SCREEN HOLDINGS CO LTD0 citations41
US10573523B2Feb 25, 2020
Substrate processing device which performs processing on substrate
SCREEN HOLDINGS CO LTD0 citations40
US10741422B2Aug 11, 2020
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations36