Inventor
KOAI KEITH K
US7 patents
Patents
7 patentsUS6364949B1Apr 2, 2002
300 mm CVD chamber design for metal-organic thin film deposition
APPLIED MATERIALS INC424 citations98
US6887317B2May 3, 2005
Reduced friction lift pin
APPLIED MATERIALS INC68 citations97
US6159299ADec 12, 2000
Wafer pedestal with a purge ring
APPLIED MATERIALS INC134 citations97
US6176930B1Jan 23, 2001
Apparatus and method for controlling a flow of process material to a deposition chamber
APPLIED MATERIALS INC62 citations94
USD568914SMay 13, 2008
Substrate support lift pin
APPLIED MATERIALS INC19 citations92
US7871470B2Jan 18, 2011
Substrate support lift mechanism
APPLIED MATERIALS INC20 citations90
US6365495B2Apr 2, 2002
Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature
APPLIED MATERIALS INC13 citations73