USD568914SExpiredUtility

Substrate support lift pin

72
Assignee: APPLIED MATERIALS INCPriority: Sep 10, 2002Filed: Mar 24, 2006Granted: May 13, 2008
Est. expirySep 10, 2022(expired)· nominal 20-yr term from priority
Inventors:David T. OrKeith Kuang-Kuo KoaiHiroyuki TakahamaTakahiro ItoKoji OtaHiroshi Sato
72
PatentIndex Score
19
Cited by
31
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate support lift pin, as shown and described.

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