Inventor
SHIMA NOBUHITO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SHIMA NOBUHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
4 patentsUS7900580B2Mar 8, 2011
Substrate processing apparatus and reaction container
HITACHI INT ELECTRIC INC27 citations92
US8047158B2Nov 1, 2011
Substrate processing apparatus and reaction container
HITACHI INT ELECTRIC INC8 citations84
US6576063B2Jun 10, 2003
Apparatus and method for use in manufacturing a semiconductor device
HITACHI INT ELECTRIC INC8 citations73
US7033937B2Apr 25, 2006
Apparatus and method for use in manufacturing a semiconductor device
HITACHI INT ELECTRIC INC2 citations62
KOKUSAI ELECTRIC CORP
3 patentsUS11986847B2May 21, 2024
Nozzle installation jig
KOKUSAI ELECTRIC CORP0 citations60
US11633753B2Apr 25, 2023
Nozzle installation jig
KOKUSAI ELECTRIC CORP1 citations60
US11535931B2Dec 27, 2022
Method of manufacturing semiconductor device, method of managing parts, and recording medium
KOKUSAI ELECTRIC CORP0 citations50