Nozzle installation jig

Abstract

Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.

The invention claimed is: 
     
       1. A nozzle installation jig comprising:
 a first portion configured to make contact with a process vessel in which a nozzle is provided; 
 a frame arranged on the first portion and extending upward with respect to the first portion; and 
 a second portion provided on the frame with a sensor configured to detect a position of the nozzle in the process vessel. 
 
     
     
       2. The nozzle installation jig of  claim 1 , further comprising a notification device configured to transmit a notification to an operator according to a detection result of the sensor. 
     
     
       3. The nozzle installation jig of  claim 2 , wherein the frame supports the second portion at a position in a direction vertical to the reference surface from the first portion. 
     
     
       4. The nozzle installation jig of  claim 2 , wherein the notification device is turned on when the nozzle is farther from an inner surface of the process vessel than a predetermined position or when the nozzle is tilted inward in a radial direction of the process vessel. 
     
     
       5. The nozzle installation jig of  claim 2 , wherein the notification device is attached to the second portion. 
     
     
       6. The nozzle installation jig of  claim 2 , wherein the notification device comprises a lamp configured to emit a light downward. 
     
     
       7. The nozzle installation jig of  claim 2 , wherein the sensor comprises a plurality of sensors, the notification device comprises a plurality of notification devices, the plurality of sensors are configured to detect positions of a plurality of nozzles arranged adjacent to each other in the process vessel, respectively, and the plurality of notification devices are configured to emit light in different colors. 
     
     
       8. The nozzle installation jig of  claim 1 , wherein the first portion is provided with a reference surface configured to make contact with a peripheral of a lower end opening of the process vessel. 
     
     
       9. The nozzle installation jig of  claim 8 , wherein the second portion is provided with a contact structure made of a fluororesin such that at least two points on the contact structure are configured to make contact with an inner surface of the process vessel. 
     
     
       10. The nozzle installation jig of  claim 9 , wherein the at least two points of the contact structure are separated from each other by a width wider than a width of a nozzle chamber of the process vessel, and the contact structure is configured to make contact with a cylindrical portion of the process vessel. 
     
     
       11. The nozzle installation jig of  claim 1 , wherein the second portion comprises a contact surface configured to determine a distance between an inner surface of the process vessel and the sensor when the contact surface makes contact with the inner surface of the process vessel. 
     
     
       12. The nozzle installation jig of  claim 1 , wherein a length of the frame corresponds to a length of the nozzle in a vertical direction and the second portion is attached to an upper end of the frame. 
     
     
       13. The nozzle installation jig of  claim 1 , wherein the sensor is configured to detect a relative position of the nozzle with respect to an inner surface of the process vessel while the first portion is in contact with a peripheral of a lower end opening of the process vessel and the second portion is in contact with the inner surface of the process vessel. 
     
     
       14. The nozzle installation jig of  claim 1 , wherein the sensor is configured to detect the position of the nozzle in a radial direction of the process vessel while the first portion is in contact with a peripheral vicinity of a lower end opening of the process vessel. 
     
     
       15. The nozzle installation jig of  claim 1 , wherein the first portion is provided with a hole through which a screwdriver is inserted, and the screwdriver is used to tighten and loosen a tilt adjusting screw configured to correct a tilt of the nozzle. 
     
     
       16. The nozzle installation jig of  claim 1 , wherein the first portion is configured to make contact with an inner surface of the process vessel in a vicinity of a lower end of the process vessel. 
     
     
       17. The nozzle installation jig of  claim 1 , wherein the first portion is provided with a step configured to make contact with a corner of a lower end opening of the process vessel. 
     
     
       18. The nozzle installation jig of  claim 1 , wherein the first portion is provided with an engaging structure configured to engage with a positioning structure provided on a lower surface or an outer peripheral surface of a flange defining a lower end opening of the process vessel. 
     
     
       19. A method of installing a nozzle using the nozzle installation jig of  claim 1 , comprising:
 (a) installing the nozzle inside the process vessel; 
 (b) inserting the nozzle installation jig into the process vessel along the nozzle; 
 (c) making the first portion in contact with the process vessel; and 
 (d) confirming the position of the nozzle based on the notification.