Inventor · disambiguated record
Antonius Arnoldus Henricus Van Der Steen
Also filed as: VAN DER STEEN ANTONIUS ARNOLDUS HENRICUS
2 granted patents·4 citations·filing 2011–2012
41Inventor score
Technology areasG03F
Files withVAN BOXTEL FRANK JOHANNES JACOBUS2
Top patents by PatentIndex Score
2 records- 0180US8675169B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2011·Granted Mar 18, 2014·4 cites·20 claims
- 0240US8675170B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Mar 18, 2014·0 cites·20 claims
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