Inventor · disambiguated record
Tom Trinh
Also filed as: TRINH TOM
2 granted patents·0 citations·filing 2018–2018
22Inventor score
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0139US11429409B2Software emulator for hardware components in a gas delivery system of substrate processing systemLAM RES CORP·Filed 2018·Granted Aug 30, 2022·0 cites·26 claims
- 0232US10761517B2Extracting real-time data from EtherCAT sensor bus in a substrate processing systemLAM RES CORP·Filed 2018·Granted Sep 1, 2020·0 cites·18 claims
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