Inventor · disambiguated record
Shinichi Umeno
Also filed as: UMENO SHINICHI
5 granted patents·2 pending applications·8 citations·filing 2015–2025
67Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0187US10573539B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 25, 2020·6 cites·10 claims
- 0274US11626298B2Liquid supply device and liquid supply methodTOKYO ELECTRON LTD·Filed 2018·Granted Apr 11, 2023·2 cites·17 claims
- 0354US12424459B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Sep 23, 2025·0 cites·19 claims
- 0453US2024128101A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0550US2025293053A1Substrate processing apparatus and method of replenishing processing liquidTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0637US10714365B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jul 14, 2020·0 cites·12 claims
- 0736US11158525B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Oct 26, 2021·0 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →