Inventor
MACHIYAMA WATARU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MACHIYAMA WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7837425B2Nov 23, 2010
Transportation apparatus and drive mechanism
TOKYO ELECTRON LTD1,055 citations98
US7286890B2Oct 23, 2007
Transfer apparatus for target object
TOKYO ELECTRON LTD13 citations83
USD766850SSep 20, 2016
Wafer holder for manufacturing semiconductor
TOKYO ELECTRON LTD8 citations81
USD562524SFeb 19, 2008
Wafer transfer apparatus
TOKYO ELECTRON LTD5 citations62