USD562524SExpiredUtility

Wafer transfer apparatus

42
Assignee: TOKYO ELECTRON LTDPriority: Jul 20, 2004Filed: Jan 5, 2005Granted: Feb 19, 2008
Est. expiryJul 20, 2024(expired)· nominal 20-yr term from priority
Inventors:Tsutomu HirokiWataru MachiyamaTakehiro Shindo
42
PatentIndex Score
5
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a wafer transfer apparatus, as shown and described.

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