Inventor · disambiguated record
Takehiro Shindo
Also filed as: SHINDO TAKEHIRO
38 granted patents·13 pending applications·1,456 citations·filing 2004–2025
96Inventor score
Technology areasH10P
Top patents by PatentIndex Score
51 records- 0198US10763139B2Vacuum transfer module and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Sep 1, 2020·338 cites·15 claims
- 0298US7837425B2Transportation apparatus and drive mechanismTOKYO ELECTRON LTD·Filed 2004·Granted Nov 23, 2010·1.1k cites·29 claims
- 0395US12440971B2Apparatus for transporting substrate, system for processing substrate, and method of transporting substrateTOKYO ELECTRON LTD·Filed 2021·Granted Oct 14, 2025·2 cites·18 claims
- 0494US11948822B2Substrate transfer device and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Granted Apr 2, 2024·2 cites·11 claims
- 0593US12362215B2Apparatus for transferring substrate and method for transferring substrateTOKYO ELECTRON LTD·Filed 2022·Granted Jul 15, 2025·3 cites·16 claims
- 0689US12009240B2Apparatus for transporting substrate, system for processing substrate, and method of transporting substrateTOKYO ELECTRON LTD·Filed 2022·Granted Jun 11, 2024·1 cites·14 claims
- 0789US11961758B2Apparatus for processing substrate and method of transferring substrateTOKYO ELECTRON LTD·Filed 2022·Granted Apr 16, 2024·1 cites·11 claims
- 0884US9589822B2Substrate transfer method with a second positioning stepTOKYO ELECTRON LTD·Filed 2014·Granted Mar 7, 2017·6 cites·6 claims
- 0984US8135486B2Substrate position determining method and substrate position detecting methodSHINDO TAKEHIRO·Filed 2007·Granted Mar 13, 2012·9 cites·21 claims
- 1083US2025387903A1Apparatus for Transporting Substrate, System for Processing Substrate, and Method of Transporting SubstrateTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1181US8821644B2Bevel/backside polymer removing method and device, substrate processing apparatus and storage mediumSAKURAGI ISAMU·Filed 2008·Granted Sep 2, 2014·12 cites·7 claims
- 1281US8216382B2Foreign matter removal method and storage mediumSHINDO TAKEHIRO·Filed 2009·Granted Jul 10, 2012·8 cites·9 claims
- 1379US7611124B2Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Nov 3, 2009·5 cites·4 claims
- 1478US10748796B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 18, 2020·2 cites·10 claims
- 1574US2025308964A1Apparatus for Transferring Substrate and Method for Transferring SubstrateTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1674US2024290645A1Apparatus for transporting substrate, system for processing substrate, and method of transporting substrateTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1773US2024222186A1Apparatus for processing substrate and method of transferring substrateTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1871US8159653B2Substrate position detection apparatus, and method of adjusting a position of an imaging component of the sameSHINDO TAKEHIRO·Filed 2008·Granted Apr 17, 2012·4 cites·8 claims
- 1969US2025191964A1Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2066US12322642B2Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2022·Granted Jun 3, 2025·0 cites·12 claims
- 2166US10971385B2Substrate processing apparatus and transfer position correcting methodTOKYO ELECTRON LTD·Filed 2019·Granted Apr 6, 2021·1 cites·8 claims
- 2261US12506023B2Opening/closing apparatus and transport chamberTOKYO ELECTRON LTD·Filed 2022·Granted Dec 23, 2025·0 cites·9 claims
- 2361US12183619B2Method of delivering substrate, and substrate delivery systemTOKYO ELECTRON LTD·Filed 2021·Granted Dec 31, 2024·0 cites·3 claims
- 2461US10133266B2Conveyance robot replacement apparatus and conveyance robot replacement methodTOKYO ELECTRON LTD·Filed 2015·Granted Nov 20, 2018·1 cites·11 claims
- 2559US11075106B2Transfer deviceTOKYO ELECTRON LTD·Filed 2020·Granted Jul 27, 2021·0 cites·7 claims
- 2658US11335586B2Transfer deviceTOKYO ELECTRON LTD·Filed 2021·Granted May 17, 2022·0 cites·16 claims
- 2758US9805960B2Substrate conveyance methodTOKYO ELECTRON LTD·Filed 2016·Granted Oct 31, 2017·1 cites·7 claims
- 2857US8113487B2Vacuum processing apparatusSHINDO TAKEHIRO·Filed 2009·Granted Feb 14, 2012·0 cites·4 claims
- 2956US12330888B2Substrate transfer device and method of cooling armTOKYO ELECTRON LTD·Filed 2022·Granted Jun 17, 2025·0 cites·16 claims
- 3056US11984340B2Teaching methodTOKYO ELECTRON LTD·Filed 2021·Granted May 14, 2024·0 cites·12 claims
- 3156US2023282503A1Substrate processing system and substrate transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 3255US2023166924A1Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 3355US2024222185A1Substrate transfer systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 3454US12224193B2Control method and substrate transfer systemTOKYO ELECTRON LTD·Filed 2021·Granted Feb 11, 2025·0 cites·7 claims
- 3553US8523138B2Vacuum processing apparatusSHINDO TAKEHIRO·Filed 2012·Granted Sep 3, 2013·0 cites·4 claims
- 3653US2024112936A1Substrate transfer module and substrate transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 3752US12094746B2Semiconductor manufacturing apparatus and method of controlling rotation of stageTOKYO ELECTRON LTD·Filed 2020·Granted Sep 17, 2024·0 cites·7 claims
- 3851US12469724B2Correction method and substrate transfer apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Nov 11, 2025·0 cites·5 claims
- 3951US12461212B2Substrate processing system and method of estimating height of annular memberTOKYO ELECTRON LTD·Filed 2022·Granted Nov 4, 2025·0 cites·11 claims
- 4051US12211719B2Method of controlling substrate transfer system and the substrate transfer systemTOKYO ELECTRON LTD·Filed 2021·Granted Jan 28, 2025·0 cites·4 claims
- 4150US11776831B2Substrate transport system and substrate transport methodTOKYO ELECTRON LTD·Filed 2021·Granted Oct 3, 2023·0 cites·12 claims
- 4250US10586729B2Transfer device and control method thereofTOKYO ELECTRON LTD·Filed 2016·Granted Mar 10, 2020·0 cites·8 claims
- 4349US9082798B2Substrate collecting methodSHINDO TAKEHIRO·Filed 2012·Granted Jul 14, 2015·0 cites·3 claims
- 4449US2024120225A1Apparatus for transferring substrate, substrate processing system and method of processing substrateTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 4547US12394645B2Substrate processing system and method of teaching transfer deviceTOKYO ELECTRON LTD·Filed 2022·Granted Aug 19, 2025·0 cites·5 claims
- 4647US2009084403A1Substrate cleaning apparatus, substrate processing apparatus, substrate cleaning method, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 4746US11491639B2Extendable deviceTOKYO ELECTRON LTD·Filed 2019·Granted Nov 8, 2022·0 cites·14 claims
- 4845US11850743B2Transport apparatus, semiconductor manufacturing apparatus, and transport methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 26, 2023·0 cites·9 claims
- 4945US2009184234A1Method for adjusting position of laser emitting deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 5042USD562524SWafer transfer apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Feb 19, 2008·5 cites·1 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →