Inventor

SHINDO TAKEHIRO

JP39 patents

⚠️ This page may combine multiple inventors who share the name “SHINDO TAKEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINDO TAKEHIRO

TOKYO ELECTRON LTD

Vacuum transfer module and substrate processing apparatus

Transportation apparatus and drive mechanism

Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate

Vacuum processing apparatus

Substrate processing apparatus

Substrate transfer method with a second positioning step

Apparatus for transferring substrate and method for transferring substrate

Substrate transfer device and substrate processing system

Opening/closing apparatus and transport chamber

Method of delivering substrate, and substrate delivery system

Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate

Teaching method

Apparatus for processing substrate and method of transferring substrate

Transfer device

Transfer device

Wafer transfer apparatus

Semiconductor manufacturing apparatus and method of controlling rotation of stage

Substrate processing apparatus and transfer position correcting method

Correction method and substrate transfer apparatus

Substrate transfer device and method of cooling arm

Substrate transfer device and substrate transfer method

Control method and substrate transfer system

Method of controlling substrate transfer system and the substrate transfer system

Substrate transport system and substrate transport method

Extendable device

Transfer device and control method thereof

Transport apparatus, semiconductor manufacturing apparatus, and transport method

Path setting system, path setting method, and software

Conveyance robot replacement apparatus and conveyance robot replacement method

Substrate processing system and method of estimating height of annular member

Substrate conveyance method

Substrate processing system and method of teaching transfer device

SHINDO TAKEHIRO

Foreign matter removal method and storage medium

Substrate position determining method and substrate position detecting method

Substrate position detection apparatus, and method of adjusting a position of an imaging component of the same

Substrate collecting method

Vacuum processing apparatus

Vacuum processing apparatus

SAKURAGI ISAMU

Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium