Inventor
HOU KUO-LUNG
TW8 patents
Patents
8 patentsUS12077850B2Sep 3, 2024
Physical vapor deposition apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12071701B2Aug 27, 2024
Plating system and method of plating wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11634832B2Apr 25, 2023
Plating system and method of plating wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12071699B2Aug 27, 2024
Apparatus for electro-chemical plating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11427924B1Aug 30, 2022
Apparatus for electro-chemical plating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12237220B2Feb 25, 2025
Apparatus and methods for determining horizontal position of substrate using lasers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12087625B2Sep 10, 2024
Apparatus and methods for determining horizontal position of substrate using lasers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12020922B2Jun 25, 2024
Apparatus for electro-chemical plating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50