Inventor · disambiguated record

Leonard G. West

Also filed as: WEST LEONARD G

1 granted patent·84 citations·filing 2002–2002

52Inventor score

Technology areasH01J

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0191US6740842B2Radio frequency power source for generating an inductively coupled plasmaTOKYO ELECTRON LTD·Filed 2002·Granted May 25, 2004·84 cites·23 claims

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