Inventor
CHANG CHIN-NAN
TW7 patents
Patents
7 patentsUS10734489B2Aug 4, 2020
Method for forming semiconductor device structure with metal silicide layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12183793B2Dec 31, 2024
Method for forming semiconductor device structure with metal-semiconductor compound layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11101354B2Aug 24, 2021
Method for forming semiconductor device structure with metal silicide layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11088136B2Aug 10, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10991688B2Apr 27, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10622351B2Apr 14, 2020
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10157916B2Dec 18, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48