Inventor
MAHOROWALA ARPAN
US6 patents
⚠️ This page may combine multiple inventors who share the name “MAHOROWALA ARPAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS9824893B1Nov 21, 2017
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP442 citations98
US11031245B2Jun 8, 2021
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP21 citations94
US10074543B2Sep 11, 2018
High dry etch rate materials for semiconductor patterning applications
LAM RES CORP33 citations94
US11183383B2Nov 23, 2021
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP16 citations93
US11987876B2May 21, 2024
Chamfer-less via integration scheme
LAM RES CORP6 citations73