Inventor

OGAWA FUKUO

JP25 patents

⚠️ This page may combine multiple inventors who share the name “OGAWA FUKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OGAWA FUKUO

NARUSHIMA YASUHITO

Silicon single crystal pull-up apparatus having a sliding sample tube

Method for manufacturing single crystal

Dopant implanting method and doping apparatus

Producing method and apparatus of silicon single crystal, and silicon single crystal ingot

Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt

Method of manufacturing silicon single crystal

Manufacturing method for silicon single crystal

Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus

Method for manufacturing single crystal

SUMCO CORP

Manufacturing method of monocrystalline silicon and monocrystalline silicon

Method for manufacturing silicon single crystal, flow straightening member, and single crystal pulling device

N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer

N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer

Deposit removing device and deposit removing method

Method for producing silicon single crystal

N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer

KAWAZOE SHINICHI

Process for production of silicon single crystal, and highly doped N-type semiconductor substrate

Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot

Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device

Silicon single crystal pulling device and graphite member used therein

SUMCO TECHXIV CORP

Method for producing single crystal, and method for producing silicon wafer

Method for manufacturing single crystal

Process for production of silicon single crystal, and highly doped N-type semiconductor substrate

Process for production of silicon single crystal

UTO MASAYUKI

Method of producing single crystal silicon