Inventor
TIEN YU-CHUNG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “TIEN YU-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WINBOND ELECTRONICS CORP
4 patentsUS5997589ADec 7, 1999
Adjustment pumping plate design for the chamber of semiconductor equipment
WINBOND ELECTRONICS CORP48 citations89
US6221785B1Apr 24, 2001
Method for forming shallow trench isolations
WINBOND ELECTRONICS CORP6 citations70
US5672241ASep 30, 1997
Method of forming metal contact holes in semiconductor fabrication
WINBOND ELECTRONICS CORP7 citations64
US6329293B1Dec 11, 2001
Method for cleaning a polymer
WINBOND ELECTRONICS CORP5 citations53