Inventor
SUNG JUNG-HWAN
KR3 patents
Patents
3 patentsUS7086132B2Aug 8, 2006
Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same
SAMSUNG ELECTRONICS CO LTD4 citations55
US7196011B2Mar 27, 2007
Apparatus and method for treating substrates
SAMSUNG ELECTRONICS CO LTD6 citations53
US6754942B2Jun 29, 2004
Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same
SAMSUNG ELECTRONICS CO LTD1 citations44