Inventor
LIND GARY B
US5 patents
Patents
5 patentsUSD1057675SJan 14, 2025
Pedestal for a substrate processing system
LAM RES CORP3 citations64
US10895539B2Jan 19, 2021
In-situ chamber clean end point detection systems and methods using computer vision systems
LAM RES CORP1 citations59
US12215420B2Feb 4, 2025
Pedestal thermal profile tuning using multiple heated zones and thermal voids
LAM RES CORP0 citations49
US11725285B2Aug 15, 2023
Preventing deposition on pedestal in semiconductor substrate processing
LAM RES CORP0 citations42
US12162117B2Dec 10, 2024
Pedestal polishing apparatus
LAM RES CORP0 citations38