Inventor
NAKANO HITOSHI
JP36 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
21 patentsUS7349064B2Mar 25, 2008
Immersion exposure technique
CANON KK41 citations96
US6665046B2Dec 16, 2003
Exposure apparatus and device manufacturing method
CANON KK60 citations96
US4952060AAug 28, 1990
Alignment method and a projection exposure apparatus using the same
CANON KK78 citations96
US5121160AJun 9, 1992
Exposure method and apparatus
CANON KK85 citations95
US7561248B2Jul 14, 2009
Immersion exposure technique
CANON KK12 citations92
US6734950B2May 11, 2004
Load-lock chamber and exposure apparatus using the same
CANON KK28 citations92
US6788392B2Sep 7, 2004
Exposure apparatus, device manufacturing method, gas substituting apparatus, and gas substituting method
CANON KK10 citations74
US6924877B2Aug 2, 2005
Chemical filter arrangement for a semiconductor manufacturing apparatus
CANON KK11 citations72
US7679718B2Mar 16, 2010
Immersion exposure technique
CANON KK2 citations63
US7420651B2Sep 2, 2008
Immersion exposure technique
CANON KK2 citations63
US7145629B2Dec 5, 2006
Exposure technique
CANON KK5 citations63
US7186285B2Mar 6, 2007
Chemical filter arrangement for a semiconductor manufacturing apparatus
CANON KK4 citations61
US9927725B2Mar 27, 2018
Lithography apparatus, lithography method, program, lithography system, and article manufacturing method
CANON KK0 citations52
US9915881B2Mar 13, 2018
Lithography apparatus and article manufacturing method
CANON KK0 citations52
US9835941B2Dec 5, 2017
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK1 citations52
US9829789B2Nov 28, 2017
Method for determining pattern of mold for imprint, imprint method, and apparatus
CANON KK1 citations52
US7619714B2Nov 17, 2009
Immersion exposure technique
CANON KK0 citations52
US7466393B2Dec 16, 2008
Immersion exposure technique
CANON KK0 citations52
US7450216B2Nov 11, 2008
Immersion exposure technique
CANON KK0 citations52
US7372542B2May 13, 2008
Immersion exposure technique
CANON KK0 citations52
US9454087B2Sep 27, 2016
Exposure apparatus and device fabrication method
CANON KK0 citations40
HINO MOTORS LTD
9 patentsUS10054074B2Aug 21, 2018
Device for determining abnormality in engine system
HINO MOTORS LTD2 citations73
US9945745B2Apr 17, 2018
Anomaly determination system and anomaly determination method
HINO MOTORS LTD2 citations73
US9765721B2Sep 19, 2017
Closed breather disconnection detection method
HINO MOTORS LTD2 citations73
US9534968B2Jan 3, 2017
Fault detection method
HINO MOTORS LTD5 citations73
US10066584B2Sep 4, 2018
Error determination unit
HINO MOTORS LTD1 citations52
US9804059B2Oct 31, 2017
Turbo rotational frequency detection device
HINO MOTORS LTD1 citations49
US9829414B2Nov 28, 2017
Fault detection device and fault detection method
HINO MOTORS LTD0 citations42
US10378422B2Aug 13, 2019
Thermostat abnormality determining device
HINO MOTORS LTD0 citations35
US10605185B2Mar 31, 2020
Valve control device and valve control method
HINO MOTORS LTD0 citations31