Inventor
CASAES RAPHAEL
US9 patents
⚠️ This page may combine multiple inventors who share the name “CASAES RAPHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS7638004B1Dec 29, 2009
Method for cleaning microwave applicator tube
LAM RES CORP8 citations83
US10658222B2May 19, 2020
Moveable edge coupling ring for edge process control during semiconductor wafer processing
LAM RES CORP7 citations82
US11798789B2Oct 24, 2023
Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features
LAM RES CORP3 citations65
US7976641B1Jul 12, 2011
Extending storage time of removed plasma chamber components prior to cleaning thereof
LAM RES CORP3 citations62
US12027410B2Jul 2, 2024
Edge ring arrangement with moveable edge rings
LAM RES CORP0 citations61
US9029267B2May 12, 2015
Controlling temperature of a faraday shield
LAM RES CORP2 citations60
US12500068B2Dec 16, 2025
Edge rings providing kinematic coupling and corresponding substrate processing systems
LAM RES CORP0 citations55