Inventor · disambiguated record
Chantal Arena-Foster
Also filed as: ARENA-FOSTER CHANTAL · ARENA-FOSTER CHANTAL J
5 granted patents·1 pending application·83 citations·filing 2000–2004
80Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
6 records- 0189US6440494B1In-situ source synthesis for metal CVDTOKYO ELECTRON LTD·Filed 2000·Granted Aug 27, 2002·52 cites·30 claims
- 0273US6924086B1Developing photoresist with supercritical fluid and developerTOKYO ELECTRON LTD·Filed 2003·Granted Aug 2, 2005·7 cites·22 claims
- 0371US6928746B2Drying resist with a solvent bath and supercritical CO2TOKYO ELECTRON LTD·Filed 2003·Granted Aug 16, 2005·18 cites·26 claims
- 0458US7044662B2Developing photoresist with supercritical fluid and developerTOKYO ELECTRON LTD·Filed 2004·Granted May 16, 2006·1 cites·22 claims
- 0552US6730605B2Redistribution of copper deposited filmsTOKYO ELECTRON LTD·Filed 2001·Granted May 4, 2004·5 cites·43 claims
- 0639US2004072706A1Removal of contaminants using supercritical processingFiled 2003·Application pending·0 cites
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