Inventor · disambiguated record

Mariya Nagatkina

Also filed as: NAGATKINA MARIYA

1 granted patent·12 citations·filing 2004–2004

34Inventor score

Technology areasG03F

Files withBREWER SCIENCE INC1

Top patents by PatentIndex Score

1 record

0164US7507783B2Thermally curable middle layer comprising polyhedral oligomeric silsesouioxanes for 193-nm trilayer resist processBREWER SCIENCE INC·Filed 2004·Granted Mar 24, 2009·12 cites·52 claims

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