Inventor · disambiguated record
Yasuharu Iwashita
Also filed as: IWASHITA YASUHARU
8 granted patents·1 pending application·21 citations·filing 2001–2017
80Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0181US10424502B2Substrate transfer device and bonding systemTOKYO ELECTRON LTD·Filed 2017·Granted Sep 24, 2019·4 cites·7 claims
- 0276US9343349B2Substrate holding apparatus and substrate holding methodTOKYO ELECTRON LTD·Filed 2013·Granted May 17, 2016·4 cites·8 claims
- 0375US8997822B2Substrate inverting device, substrate inverting method, and peeling systemIWASHITA YASUHARU·Filed 2012·Granted Apr 7, 2015·5 cites·3 claims
- 0475US7573054B2Edge exposure apparatus, coating and developing apparatus, and edge exposure methodTOKYO ELECTRON LTD·Filed 2006·Granted Aug 11, 2009·7 cites·18 claims
- 0554US8795463B2Joint system, joint method, program and computer storage mediumNISHIBAYASHI TAKAHIRO·Filed 2011·Granted Aug 5, 2014·1 cites·11 claims
- 0644US9679798B2Substrate conveyance apparatus and substrate peeling systemTOKYO ELECTRON LTD·Filed 2014·Granted Jun 13, 2017·0 cites·10 claims
- 0742US9595462B2Peeling systemTOKYO ELECTRON LTD·Filed 2014·Granted Mar 14, 2017·0 cites·10 claims
- 0835US2002053321A1Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2001·Application pending·0 cites
- 0930US9165758B2Peeling system, peeling method, and computer storage mediumYOSHITAKA NAOTO·Filed 2011·Granted Oct 20, 2015·0 cites·19 claims
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