Inventor
NGUYEN VIETHA
KR8 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN VIETHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS9929099B2Mar 27, 2018
Planarized interlayer dielectric with air gap isolation
SAMSUNG ELECTRONICS CO LTD7 citations82
US10304734B2May 28, 2019
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US10062609B2Aug 28, 2018
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US9972528B2May 15, 2018
Semiconductor devices
SAMSUNG ELECTRONICS CO LTD3 citations72
US10916437B2Feb 9, 2021
Methods of forming micropatterns and substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51
US10186485B2Jan 22, 2019
Planarized interlayer dielectric with air gap isolation
SAMSUNG ELECTRONICS CO LTD0 citations51
US10090381B2Oct 2, 2018
Semiconductor device including air-gap
SAMSUNG ELECTRONICS CO LTD0 citations40