Inventor

TANIMURA HIDENOBU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TANIMURA HIDENOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US8366370B2Feb 5, 2013

Vacuum processing apparatus

HITACHI HIGH TECH CORP6 citations69

US11482435B2Oct 25, 2022

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations47

TANIMURA HIDENOBU

1 patent

USD703160SApr 22, 2014

Grounded electrode for a plasma processing apparatus

TANIMURA HIDENOBU29 citations85

HIRATA SPINNING

1 patent

US9620399B2Apr 11, 2017

Load port

HIRATA SPINNING7 citations81

OHASHI TOMOHIRO

1 patent

US8532818B2Sep 10, 2013

Vacuum chamber

OHASHI TOMOHIRO6 citations70