Inventor · disambiguated record
Kazuo Kimata
Also filed as: KIMATA KAZUO
3 granted patents·2 pending applications·118 citations·filing 1987–2004
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0180US6234738B1Thin substrate transferring apparatusMECS CORP·Filed 1999·Granted May 22, 2001·69 cites·4 claims
- 0257US4778331ACarrier system for silicon waferMECS CORP·Filed 1987·Granted Oct 18, 1988·27 cites·3 claims
- 0352US4735548ACarrier system for clean roomMECS CORP·Filed 1987·Granted Apr 5, 1988·22 cites·3 claims
- 0436US2005115351A1Seal structure for transfer robotAITEC CORP·Filed 2004·Application pending·0 cites
- 0534US2002148320A1Arms of scalar robotAITEC CORP·Filed 2002·Application pending·0 cites
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